銳隆光電037-431674玻璃晶圓Glass wafer 矽晶圓Silicon wafer 石英晶圓Quartz wafer
2吋4吋6吋8吋12吋 2Inch 4Inch 6Inch 8Inch 12Inch 晶圓鍍膜 Wafer coating

4"silicon wafer    
Diameter:100mm  
Thickeness:525±25um
Type/Dopant:P/Boron 
Orientation:<100>   
Resistivity:1-10ohm-cm  
Flate:32.5±2.5mm  
Single side polished

6"silicon wafer    
Diameter:150mm  
Thickeness:650-700±25um
Type/Dopant:P/Boron 
Orientation:<100>   
Resistivity:1-10ohm-cm  
Flate:32.5±2.5mm  
Single side polished 

8"silicon wafer    
Diameter:200mm  
Thickeness:725+/-25um
Type/Dopant:P/Boron 
Orientation:<100>   
Resistivity:1-100ohm-cm  
Single side polished

12"silicon wafer    
Diameter:300mm  
Thickeness:725+/-25um
Type:P    
Orientation:<100>   
Resistivity:1-100ohm-cm  
Double side polished    
    
8"CZ Prime Polished wafer   
Diameter:200±1mm 
Thickeness:725±20um
Type/Dopant:P/Boron 
Orientation:<100>   
Resistivity:<0.0035ohm-cm 
Flate:     
Notch Ang:Per SEMI   
Notch Dep:Per SEMI   
Location:(100)+/-1 
Frontside:Mirror Polish   
Backside:BSD+LTO 
TTV:<10um   
Bow/Warp:<90um  
Particle:≧0.20um@≦25ppw

8"CZ Prime Polished wafer    
Diameter:150±0.5mm 
Thickeness:625±25um 
Type/Dopant:P/Boron 
Orientation:<100>   
Resistivity:<0.004-0.007ohm-cm 
Flate:     
Second Flat:None   
Primary Flat Location:｛110｝± 1° 
Primary Flat Length:57.5± 2.5 mm 
Frontside:Mirror Polish   
Backside:LOT4000-8000A  
TTV:< 10um   
Bow/Warp:<60um   
Particle:≧0.30um@ ≦15ppw  
 
8"CZ Prime Polished wafer    
Diameter:150±0.5mm 
Thickeness:625±25um 
Type/Dopant:P/Boron 
Orientation:<100>   
Resistivity:0.0013-0.0025ohm-cm 
Flate:     
Second Flat:None   
Primary Flat Location:｛110｝± 1° 
Primary Flat Length:57.5± 2.5 mm 
Frontside:Mirror Polish   
Backside:LOT4500-5500A  
TTV:<10um   
Bow/Warp:<40um   
Particle:≧0.30um@≦ 5ppw

8"CZ Prime Polished wafer   
Diameter:200±1mm 
Thickeness:725±20um
Type/Dopant:P/Boron 
Orientation:<100>   
Resistivity:0.003-0.005ohm-cm
Flate:     
Notch Ang:Per SEMI   
Notch Dep:Per SEMI   
Location:(100)+/-1 
Frontside:Mirror Polish   
Backside:BSD+LTO 
TTV:<4um   
Bow/Warp:<90um  
Particle:≧0.20um@ ≦25ppw